Showing Results for
- Academic Journals (527)
Search Results
- 527
Academic Journals
- 527
-
From:Solid State Technology (Vol. 46, Issue 5) Peer-ReviewedConsidering that wafer cleaning is crucial to virtually every wafer-processing step, Solid State Technology asked several industry process experts: How do you perceive conventional wet chemistry or nonliquid...
-
From:Solid State Technology (Vol. 43, Issue 8) Peer-ReviewedSumitomo Electric, Osaka, will increase production of its GaAs wafers during the second half of its fiscal year (October-March 2001). Company officials said that to keep up with the demand from cellular phone...
-
From:Solid State Technology (Vol. 33, Issue 10) Peer-ReviewedMagnetically Enhanced Reactive Ion Etching of Poly Gate Electrodes Smaller Than 0.5 [micrometer] Polysilicon (poly) gate electrodes for 64 Mbit DRAMs must have vertical profiles with dimensions smaller than 0.5...
-
From:Solid State Technology (Vol. 33, Issue 7) Peer-ReviewedSingle Wafer Rapid Thermal CVD for Poly-Emitter Bipolar and BiCMOS Devices Bipolar transistor performance can be enhanced when doped polysilicon serves as a diffusion source and as the emitter and extrinsic base...
-
From:Solid State Technology (Vol. 36, Issue 5) Peer-ReviewedSince 1973, when Perkin-Elmer first introduced its scanning projection system for lithography, optical projection of a mask pattern onto a photoresist-coated wafer has become the standard method of lithographic imaging...
-
From:Solid State Technology (Vol. 33, Issue 1) Peer-ReviewedThe growth of the economy has visibly slowed in the last few months, and the big question is; "Will it begin a descent into a recession or will it soft land?" Semiconductor equipment and materials suppliers are at the...
-
From:Solid State Technology (Vol. 40, Issue 12) Peer-ReviewedIdentification Exposure tool acquisitions can be confusing, particularly if you're purchasing several tools. Ideally, production would like to purchase the fastest "wafers/hr" tools to maximize capacity. Unfortunately,...
-
From:Microwave Journal (Vol. 40, Issue 9) Peer-ReviewedHigh performance mm-wave (MMW) LNAs are an important component for advanced communication links, smart munitions, passive imaging and radiometric applications. InP HEMTs have demonstrated the highest extrapolated cutoff...
-
From:Solid State Technology (Vol. 40, Issue 11) Peer-ReviewedThe industry is now at a crossroads. The continually escalating cost of building new labs has made achieving acceptable financial return significantly more difficult. Key areas of improvement such as yield, wafer size,...
-
From:Solid State Technology (Vol. 40, Issue 10) Peer-ReviewedSince completing the industry's largest merger in May, the combined KLA-Tencor has already demonstrated signs of a strong union. The company introduced at SEMICON/West the industry's first automated defect classification...
-
From:Solid State Technology (Vol. 41, Issue 7) Peer-ReviewedMore than 80% of the yield loss of volume-manufactured VLSIs has been attributed to particulate microcontamination [1]. As device geometries continue to shrink and wafer sizes increase, particulates and airborne and...
-
From:Solid State Technology (Vol. 41, Issue 7) Peer-ReviewedThe combination of optical proximity correction (OPC) design features with alternating phase-shift photomasks (PSM) has been shown to have real potential for a manufacturable process window at less than half the...
-
From:Solid State Technology (Vol. 45, Issue 7) Peer-ReviewedOVERVIEW Supercritical carbon dioxide is poised to replace conventional photoresist stripping in applications where via depth or underlying material sensitivity make conventional processing difficult or impossible....
-
From:Chemical Engineering (Vol. 121, Issue 9) Peer-ReviewedCrystal Solar Inc. (Santa Clara, Calif.; www.xstalsolar.com) is preparing for high-volume production of silicon wafers using a process that forms the wafers directly from trichlorosilane (TCS) gas using a chemical vapor...
-
From:Advanced Materials & Processes (Vol. 167, Issue 1) Peer-ReviewedA silicon material that captures nearly all of the sun's light, generating hundreds of times more current than conventional silicon, has reportedly been developed at SiOnyx, Beverly, Mass. Called black silicon, the...
-
From:Solid State Technology (Vol. 44, Issue 5) Peer-ReviewedOVERVIEW An industry-wide survey of some of the latest 300mm equipment and materials shows that the challenges of processing 300mm wafers are being understood and addressed. Many suppliers have devised clever solutions...
-
From:Solid State Technology (Vol. 44, Issue 3) Peer-ReviewedIBM has licensed Ibis Technology Corp. to manufacture and sell SIMOX-SOI wafers, using IBM's proprietary SIMOX process, to IBM and to all Ibis customers. Under the royalty-bearing license agreement, Ibis may use IBM's...
-
From:Solid State Technology (Vol. 44, Issue 6) Peer-ReviewedThe Smart Cut process produces thin film silicon-on-insulator (SOI) wafers for high-volume production. The Smart Cut SOI product, UNIBOND, has very good uniformity of the top S1 film; BOX quality is identical to thermal...
-
From:Solid State Technology (Vol. 50, Issue 11) Peer-ReviewedCMOS circuits using silicon channels are hitting the performance wall, and doping with germanium and straining the lattice have already been used to push the limits. Thus, compound semiconductors are again under...
-
From:Journal of Research of the National Institute of Standards and Technology (Vol. 107, Issue 4) Peer-ReviewedLight scattering is used by semiconductor manufacturers to inspect silicon wafers for particulates, defects, and surface roughness. Since a particle's size determines its potential to cause device failure, it is...