Optical properties of fluorinated silicon oxide films by liquid phase deposition for optical waveguides

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Publisher: Institute of Electrical and Electronics Engineers, Inc.
Document Type: Article
Length: 101 words

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Abstract :

An investigation of the optical properties of the liquid phase deposition fluorinated silicon oxide (LPD-SiOF) films for optical waveguide in optoelectronic devices revealed two main absorption peaks at the wavenumbers of 1090 and 930 cm(super -1) in Fourier transform infrared spectrum, respectively. These two main peaks correspond to Si-O and Si-F bonds. The films reveal very meager content of water components such as Si-OH bonds and OH group. The relative transmittances to quartz glass are over 98% in the wavelength region from 350-2500 nm, despite the gradual decline of the transmittance for 600-nm-thick LPD-SiOF film from the wavelength around 700 nm.

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Gale Document Number: GALE|A54174135